Component comprising submicron hollow spaces

ABSTRACT

An optical component or an analytical platform includes a substrate, an array of microstructures on the substrate and microchannels formed by side walls of adjacent microstructures, a width of the microchannels varies as a function of distance to the substrate, the width continuously decreasing with increasing distance from the substrate within at least one distance-interval. In a method for producing such a component or such a platform a substrate with an array of surface microstructures is coated in a vapor treatment in such a way that shadowing effects of the coating mechanism narrow at least partially a width of the upper parts of side walls of the microstructures thereby forming at least partially embedded microchannels.

This application claims the benefit of U.S. Provisional Application No.60/356,284 filed on Feb. 12, 2002.

BACKGROUND OF THE INVENTION

The present invention relates to optical and to analytical componentscomprising embedded microchannels. The present invention also relates tothe method of producing such optical and analytical components. Thepresent invention also relates to the use of such optical and analyticalcomponents.

Optical components comprising micron or submicron surface structures arewidespread in use. The optical field related to such components is thefield of diffractive optics. Among different products one of the mostfamous representative is the compact disc which is roughly speaking agrating structure in a plastic substrate coated with a metal. Otherexamples are antireflection gratings, grating couplers and wire gridpolarizers a well as the micro-electro-mechanical systems and resonantgrating devices.

Many of these systems need to be coated either in order to enhance theiroptical performance or in order to electrically contact the surface orin order to protect the structures. Among the coatings which aretypically used in such kind of structures there are four differentclasses:

-   conserving coatings: coatings which need to cover all parts of the    surface with a thin, homogeneous layer, mainly conserving the    surface structure (see FIG. 1 a).-   filling coatings: coatings which need to fill the structures    completely. This class of coating can be subdivided further in    coatings where the surface profile needs to be reproduced on the    coating surface (see FIG. 1 b left side) and coatings where the    structure needs to be smeared out ( see FIG. 1 b right side).-   selective coatings: only parts of the structure need to be coated.    Coating of other parts needs to be avoided (see FIG. 1 c).-   cover layers: coatings which cover only the structure without    penetrating the valleys, i.e. burying or embedding the structures    while leaving the index distribution within the structures mainly    unchanged (see FIG. 1 d).

Conserving coatings have the goal to at least substantially conserve thesurface structure. The coating needs to be of principally homogeneousthickness independent of the orientation of the features of the surface.This can be realized for example with chemical vapor deposition (CVD)methods, where the surface to be coated is chemically activated and achemical reaction leads to deposition of material on every part of thesubstrate in a homogeneous way.

In order to realize filling coatings, chemical vapor deposition can beused as well. However, since the deposition of the particles stronglydepends on the flux of the reactive gas used and the small structurescreate turbulences as well as flux inhomogenities, as a consequenceinhomogenities in coating thicknesses may appear. In addition, since thedeposition rate (defined as number of particles deposited per time unit)is proportional to the surface presented in an area, this type ofcoating technique tends to smear out the structure very efficiently. Ifthe structure is to be reproduced in the coating (see FIG. 1 b), thiskind of filling technique cannot be used.

Other techniques such as sputtering can also be used to fill thestructures. However especially for structures with small feature sizesand a high aspect ratio (aspect ratio=the depth of the structure relatedto the minimum feature size), this often is quite difficult, since selfattenuating shadowing effects lead to overhanging structures and toinhomogeneous thicknesses of the coating. Note that this is a problemwell known with coatings for semiconductor devices. As described in DE197 02 388 the sputtering process for semiconductor devices with smallfeature sizes exactly shows the aforementioned disadvantages.

In order to realize selective coatings evaporation can be done from amore or less distant point source. If the process is realized in such away that the mean free path of the coating particles is larger than thedistance from the source to the substrate to be coated, the coating willbe a directional process, thus defining the direction of the particlemovement. If the direction is parallel to the normal of the substratealmost no particles will be deposited on the vertical interfaces of thestructures.

Sometimes the surface structures need to be conserved and mainly thevertical surfaces need to be coated. In this case a collimating devicecan be used. Then even sputter sources are applicable, as disclosed inU.S. Pat. No. 6,210,540. Here a coating mask-blocks out the particleflux propagating in directions parallel to the normal of the substratemechanically. The coating zone is restricted to areas where the particleflux is at an oblique incidence angle with respect to the normal of thesubstrate to be coated.

Note that in this case a high percentage of the coating material isdeposited on the mask and therefore lost for the coating on thesubstrate. This results in low deposition rates as well as in lowefficiency for sputter target use.

Sometimes tilted directional selective coatings in combination with theshadowing effects are used to create etching mask on the top of astructure, covering only the upper parts and leaving the lower parts ofthe structure unprotected and open for a following etching procedure.This as well can be done either with point sources and sufficient meanfree paths of the coating particles or with collimating masks.

For cover layers the situation is quite different. These layers aremainly used for protecting the underlying structures. None of theaforementioned methods can be used without major modifications leadingto additional production costs. State of the art teaches that suchstructures are needed for example for embedded wire grid polarizers asdisclosed in U.S. Pat. No. 6,288,840. However nothing is said how suchcover sheets could be realized. In today's applications it is common toprotect the structures using thin glass cover sheets, mechanicallycemented to the structures. Note that in many cases no adhesive can beused in the structure region since this would fill the structures andinfluence the optical performance of the device. In addition, in orderto fully protect the small features, such devices very often have to besealed. This is quite expensive to realize and very often thedisadvantageous optical influence of the glass sheet cannot be avoided.

It is clear from the description above that according to procedures ofthe described prior art it is not known how to practicably cover themicrostructures without almost completely filling the grooves in thestructure. For example with wire grid polarizers as discussed in U.S.Pat. No. 6,288,840 (hereinafter referred to as '840), it is necessarythat the grooves between the metal rods from hollow spaces, since anincrease of the index of refraction in the grating grooves directlyaffects the performance of the component. However as is discussed in'840 it is advantageous to use an embedded wire grid polarizer. Asdescribed in '840 such a polarizer comprises a first layer, a secondlayer and an array of parallel, elongated, spaced apart elements,sandwiched between the first and the second layers. The inventorsmention that in a preferred embodiment the material in the grooves willbe air or vacuum, but for reasons of practicality other materials may beused. It is concluded that the realization of embedded groove structuresis not practicable.

BRIEF SUMMARY OF THE INVENTION

The purpose of the present invention is to overcome the problems of theaforementioned prior art. It is the objective of the present inventionto disclose practicably realizable designs of components with embeddedhollow spaces or channels or volumes of predetermined geometry in themicrometer or submicrometer range. As a collective term for hollowspaces or channels or volumes of predetermined geometry in themicrometer or submicrometer range the term “microchannels” will be used.It is yet another purpose of the present invention to disclose a methodof producing such components without sacrificing practicability andprofitability. It is yet another purpose of the invention to disclose anumber of optical and/or analytical systems based on such devices.

Optical components are components comprising means for specificallyinfluencing electromagnetic fields in a predetermined way when such anelectromagnetic field is established within or at the border of theoptical component.

In an embodiment of the present invention an optical component comprisesa substrate; an array of microstructures on the substrate; andmicrochannels formed by side walls of adjacent microstructures, a widthof the microchannels varying as a function of distance to the substrate,said width continuously decreasing with increasing distance from thesubstrate within at least one distance-interval.

A consequence of the fact that a narrowing of the width of themicrochannels with increasing distance to the substrate is realized isthat the microstructures are less open to the environment and thereforeare protected since large dirt or dust particles are prevented frominvading the microchannels.

In a further embodiment the optical according to the present inventionat least some of the microstructures of said array comprise a centralbody coated with a cover on a top of said central body, said cover atleast partially covering side walls of the central body thereby forminga microstructure side wall geometry extending over the top of thecentral body in such a way that said width has local a minimum above thetop of the central body.

The material of the central body may be different to the material of thecover. This has the advantage that the geometry of the central bodycould be chosen rectangular leading together with the air in themicrochannels to an optical effect. The cover can be chosen just tonarrow the width of the microchannel in the cover region withoutnegatively influencing said optical effect, however protecting thecentral body-mircrochannel configuration. Since the cover narrows thewidth at least a local minimum above the top of the central body isrealized. The at least local minimum can be a general minimum of widthof the corresponding microchannel.

In a further embodiment of the present invention the optical componentthe local minimum is equal to zero and the microchannel is completelyseparated from the environment of the component.

With such a component the microchannels are completely protected and itis even possible to further overcoat or further process, as for examplecement the device between glass prisms without touching themicrostructures and disturbing their performance.

An additional feature to one of the embodiments of the present inventioncan be that said elements have at least approximately the shape ofelongated rods and form at least locally a periodic grating structure.

Depending on the grating period relative to the wavelength used periodicgrating structures can be used as diffraction gratings, asantireflection gratings or among others as, birefringent coating layers.Their performance strongly depends on the material in the gratinggrooves. With the embodiment as described such a grating structure canbe realized as an embedded structure without loss of opticalperformance, since the index distribution in the grating grooves remainsalmost. This, to give an example can be used to realize a wire gridpolarizer.

In a further embodiment of the present invention the local minimum is atleast close to zero and an at least almost closed microchannel isrealized.

This minimum can be chosen as small as 5 nm or even below. The processaccording to the present invention for realizing such components allowsto control very accurately the final minimum of the width of themicrochannels

In a further embodiment of the present invention the central bodycomprises a first layer system with at least one metallic layer and thecover comprises a second layer system with at least one dielectriclayer.

This allows to combine the well know optical effects of thin filmmultilayer stacks with the advantages of microstructures.

Analytical platforms are components comprising at least auxiliary meansfor manipulating fluidic, gaseous or solid measurement samples when suchmeasurement samples are present within or at the surface of thecomponents.

In an embodiment of the present invention an analytical platformcomprises a a substrate; an array of microstructures on the substrate;microstructures, a width of the microchannels varying as a function ofdistance substrate, said width continuously decreasing with increasingdistance from the substrate within at least one distance-interval.

In a further embodiment of the present invention the analytical platformis designed for filtering particles of given size out of a fluid. Inthis embodiment a minimum dimension of said width within or above saiddistance-interval is equal to or slightly less than a minimum dimensionof particles to be filtered out of a fluid.

A Method according to the present invention for filtering particles ofgiven size out of a fluid comprises the steps of:

-   providing an analytical platform comprising: a substrate; an array    of microstructures on the substrate; microstructures, a width of the    microchannels varying as a function of distance to the substrate,    said width continuously decreasing with increasing distance from the    substrate within at least one distance-interval, wherein a minimum    dimension of said width within or above said distance-interval is    equal to or slightly less than a minimum dimension of particles to    be filtered out of a fluid;-   applying the fluid to be filtered to a surface of the platform;-   using capillary forces to make the fluid to be filtered entering the    microchannels and to prevent the particles to be filtered out from    entering the microchannels; and-   using at least one of capillary forces, gravity forces, and    centrifugal forces to spread out the filtered fluid along the    microchannels into areas of the analytical platform where no fluid    to be filtered was applied to the surface;

In a further embodiment of the present invention a method for producingan array of at least partially embedded microchannels comprises thesteps of:

-   providing a substrate;-   applying surface microstructures to said substrate;-   guiding said substrate to a vapor treatment;-   depositing a cover on said microstructure using a physical vapor    deposition technique to guide coating particles to said    microstructures; and-   using shadowing effects of the coating mechanism to narrow at least    partially a width of the upper parts of side walls of the    microstructures thereby forming at least partially embedded    microchannels.

To summarize the present invention arrays of embedded microstructurescomprising a cover material which not only covers the top ofmicrostructures as shown in the prior art but at least partially coversthe side walls of the microstructures to be embedded. It is subjectmatter of the present invention that this side wall coating forms a newsidewall geometry extending over the top of the original uncoatedstructure in such a way that the sidewall extension above the top of theoriginal central body has a minimum. This minimum can be zero,completely separating microchannels from the environment. For manyapplications in semiconductor components isolated realizations a suchkind of microchannels are fabricated by accident with standardsputtering techniques. In these applications great effort and additionalprocessing is invested in order to avoid such structures. It is part ofthe present invention to incorporate such structures in the layout ofthe optical component and/or analytical platforms. It is as well part ofthe present invention that central bodies as well as the cover ofcentral bodies can comprise layer systems of materials with differentoptical constants, i.e. a multilayer stacks and that the layout of thelayer systems can be chosen in order to enhance the optical performanceor in order to add additional characteristics i.e. optical, chemical ormechanical characteristics.

It is as well part of the present invention to manipulate the angulardeposition rate of the coating particles reaching the substrate surfaceto be coated in order to realize the extended sidewall coating. It issubject matter of the present invention to influence this angulardeposition rate in a defined way with the choice of the coatingconditions and to avoid the use of coating masks.

DESCRIPTION OF DRAWINGS

FIG. 1 a is a cross-section of a structure with prior art conservingcoating;

FIG. 1 b is a cross-section of a structure with prior art fillingcoating;

FIG. 1 c is a cross-section of a structure with prior art selectivecoating;

FIG. 1 d is a cross-section of a structure with prior art cover layer;

FIG. 2 a is a cross-section of a coated structure according to thepresent invention with microchannels separated from the environment;

FIG. 2 b is a cross-section of a coated structure according to thepresent invention with structured coating stack and with microchannelsconnected to the environment;

FIG. 2 c is a cross-section of a coated structure according to thepresent invention with microchannels forming thin elongated channels;

FIG. 3 a shows schematically a first snapshot of a coating illustratinga substrate moving to a coating source;

FIG. 3 b shows schematically a second snapshot of the coating procedureof FIG. 3 a illustrating the substrate close to the coating source;

FIG. 3 c shows schematically a third snapshot of the coating procedureof FIG. 3 a illustrating the substrate past the coating source;

FIG. 4 a is a cross-section of a structure with microchannels connectedto the environment and filled with air;

FIG. 4 bis a cross-section of the structure of FIG. 4 a having themicrochannels filled with fluid;

FIG. 5 a is a cross-section of a structure with microchannels connectedto the environment used as analytical platform; and

FIG. 5 b is a top view of the structure of FIG. 5 a.

DETAILED DESCRIPTION OF THE INVENTION

Reference will now be made to the drawings in which the various elementsand preferred embodiments of the present invention will be discussed.

A. Devices

Illustrated in FIGS. 2 a, 2 b and 2 c is a component 1 with embeddedmicrochannels 15,15′. This component 1 comprises a substrate 3, agrating region G and a coating region C. The grating region G comprisesfirst structure domains 5 and second structure domains 7. The firststructure domains 5 comprise materials different from air. The firststructure domains 5 can comprise either a dielectric material or acombination of dielectric material layers or a metal or a combination ofdifferent metal layers. It can comprise as well a combination ofdielectric layers and metal layers.

The second structure domains 7 comprise the lower part of microchannels15,15′. On top of the first structure domains 5 within the coatingregion C is a coating 9. As can be seen from FIG. 2 a-2 c, at least theupper part of the side walls of the first structure domains 5 arecovered by side wall covers 11. With respect to the cover 9 and the sidewall covers 11 the first structure domains form central bodies at leastpartly encapsulated. The first structure domains 5 together the sidewall covers 11 in the grating region G and the coating 9 in the coverregion C form microstructures. Adjacent microstructures form the sidewalls of the microchannels 15,15′.

The side walls of the microchannels 15,15′ within the grating region Gwhich are at least in the upper part formed by the side wall covers 11are continuously extended into the cover region C, forming the sidewalls of the upper part of the microchannels 15,15′. The cross sectionof the upper part of the microchannels 15,15′ has the shape of a crosssection of the shoulder of a bottle. In FIG. 2 a the bottlenecks arecompletely closed and therefore the microchannels 15 are separated fromthe environment. However, as shown in FIG. 2 b the microchannels 15 alsocan be connected to the environment by connection channels 17. In anycase width of the microchannels 15,15′ varies as a function of distanceto the substrate and is continuously decreasing with increasing distanceto the substrate 3 within at least one distance-interval.

A high number (more than 5) of spaced apart microstructures applied tothe substrate, wherein the distance of adjacent microstructures is atmost several microns, form an array of microchannels 15,15′.

At least the upper part of the side walls of the first structure domains5 are coated with the side wall covers 11. Coating the bottom of themicrochannels 15,15′ and even coating the lower parts of the firststructure domains 5 can be avoided with the process for producing suchcomponents according to the present invention.

As already mentioned the microchannels 15,15′ can be connected to theenvironment by connection channels 17, as shown in FIG. 2 b. Themicrochannels 15,15′ can be filled with a fluid if a droplet of thefluid is applied to the top of the cover region, covering at least twoof the microstructures and therefore sealing at least one connectionchannel 17. Capillary forces then drag the fluid into the at least onemicrochannel 15,15′. This fluid, as an example can be a melt of a metalor a biological essay. The width of the connection channels 17determines the size of the particles allowed to enter the microchannels15,15′. This filtering effect can be used in analytical applications aswill be explained further down.

Further shown in FIG. 2 b is the possibility to let the cover region Ccomprise a structured multilayer stack 9′. This is particularlyinteresting if the component according to the present invention is anoptical component. This structured multilayer stack 9′ can be designedin such a way that it acts as an antireflection layer. it is worthmentioning that in most cases it is favorable to use transparent glasssubstrates such as quartz or BK7 or transparent plastic substrates suchas Polycarbonate or PMMA. Another possibility would be to realize acolor filter or neutral density filter on the structure. In the casewhere the dimensions of the microstructures and microchannels 15,15′ arein the order of magnitude or below the wavelength of the electromagneticfields impinging on the optical component rigorous diffraction theory oreffective medium theories can be applied in order to simulate theoptical characteristic and to optimize the layout of the coatingstructure. If the connection channels 17 are closed, as shown in FIG. 2a the structured multilayer stack could be covered by an unstructuredmultilayer stack. In addition components comprising additionalmultilayer stacks between the substrate 3 and the grating region G canbe realized.

In FIG. 2 c shown is a component where the bottom of the secondstructure domains 7 is coated in such a way that the microchannels 15′form thin, elongated channels. Here again capillary forces can be usedto fill these channels with a fluid.

B. Fabrication

As discussed above prior art teaches that standard sputter techniquesapplied to small and deep structures in many cases lead to hollow spaces(DE 197 02 388) and the person skilled in the art tries to avoid thesehollow spaces. It is subject matter of the present invention to controlthe angular distribution of the particle deposition rate on thesubstrate in such a way, that a well defined shape of these hollowspaces, leading to microchannels 15,15′ is realized. The angulardistribution of the coating particles depends on a various number ofcoating parameters.

The angular distribution depends on the target structure, whether it iscrystalline, polycrystalline or amorphous. It depends also on thegeometry of the target, whether it is flat or curved. The angulardistribution depends as well on how particles generally are excited fromthe target source, for example by a collimated or focussedexcitation-beam and whether the angle of incidence of the excitationbeam is obtuse or acute. The angular distribution of the coatingparticles further depends on what kind of excitation beam, if any, isused: gas, ions, electrons, laser light is possible among others.

Once the particles are excited from the target, there is a certainprobability of scattering, depending on the gas pressure, the atom massof the gas used, the flux of the gas and, up to a certain extend, theorientation of the flux of the gas. The probability of scatteringdepends as well on the path a particle has to propagate before hittingthe substrate.

In coating procedures where the substrate with the first structuredomains 5 to be coated passes the target in close distance (see FIGS. 3a-3 c), power modulation or modulation of plasma frequency allows toinfluence the angular distribution of coating particles impinging on thefirst structure domains 5 on the substrate. This angular distributiondetermines the final geometry of the microstructures and therefore thegeometry of the microchannels 15,15′.

Shadowing effects of the side walls of the first structure domains 5play an important role for this process. As an example we investigate asubstrate with a surface grating structure. The grating structurecomprises lamellar first structure domains 5 where the grating region Gis 500 nm thick and the first structure domains 5 as well as the secondstructure domains 7 have a width of 250 nm. The second structure domains7 have an aspect ratio of 500 nm/250 nm=2. (The aspect ration is theratio of feature height to feature width). We define the non-conicalplane to be the plane which is spanned by the grating vector and thenormal on the surface of the substrate. The propagation vector ofcoating particles which are impinging on and in the grating region G canhave a vector-component parallel to the non-conical plane. If werestrict the coating to coating particles where this vector-component istilted 45° or more to the normal on the surface of the substrate onlythe upper half of the side walls are coated. This is because the lowerhalf of the side walls are shadowed by the opposing side wall of theadjacent microstructure. This effect is even self-attenuating becausewith increasing coating thickness of the upper half of the side wallsthe distance between the coated side walls decreases and as aconsequence the shadowing effect increases.

FIG. 3 shows with three typical coating snapshots how the shadowingeffect can be practicably realized: The coating source 21 comprises atarget producing coating particles. The structured substrate 23 is fixedon a rotating substrate mount 27 in such a way that in position 3 b ofthe rotating mount the structured surface faces the coating source andthe grating lines are at least almost parallel to the rotation axis ofthe rotating mount. The coating process can be switched off as long asthe substrate is directly in front of the target (see FIG. 3 b).Switching on the coating process during positions according to FIG. 3 aand FIG. 3 c results in predominantly coating the side walls of thefirst structure domains 5 in a symmetric way as well as the top of thefirst structure domains 5. Switching on the coating process in positionsaccording to 3 a only or 3 c only results in an asymmetric coating ofthe side walls. Note that switching on the coating process during allthree positions 3 a 3 b and 3 c also can result in to shadowing effectsif the aspect ratio of the second structure domains 7 is high enough, inparticular is above 1. Different deposition rates can be chosen in acontinuous way, which means that the process is not limited to an on-offstep function; the deposition rate is rather a continuous function tochoose. Moreover for asymmetric coatings one material could be coated onone side and another material could be coated on the other side, if e.g.two different targets are used (not shown). This opens the possibilityto fabricate for example effective blazed gratings (e. g. asymmetricgratings).

In order to control the deposition rate power modulation techniques canbe applied. Another possibility would be to vary the plasma frequency.The inventors found that increasing the plasma frequency up to a certainupper frequency limit reduces the deposition rate, and above that limit(100 kHz or more) the deposition rate is essentially zero. Since a fastchange in deposition rate is required (synchronous to the movement ofthe substrate) it is of advantage to use this high frequency effect.Note that in contrast to U.S. Pat. No. 6,210,540 no masking of thetarget is required.

Once the possible angular distributions of coating particles fordifferent process parameters have been evaluated it is possible tosimulate, for example based on particle propagation, scattering anddeposition models, the deposition on the substrate as a function ofposition on the surface of the structured substrate to be coated.Different process parameters result in different coating geometries,said geometries also depending on the actual geometry of themicrostructure in the substrate. Based on these simulations it ispossible to decide on the optimum coating strategy, possibly includingdynamical adjustments of the angular distribution of the particlesdeposition rate, Therefore the type of coating materials and the energyof their particles is adopted during the coating process together withthe active and dynamic control of the angular distribution of thecoating particles deposition rate to realize the desired coatinggeometries. For example for optical components comprising gratingstructures with grating periods well below the wavelength of theelectromagnetic field the component is illuminated with (zero ordergratings) the optical performance in most cases shows weak dependence onthe grating period as long as the period is well below the wavelength.Therefore the grating period can be chosen relatively free and adoptedto the coating requirements. Smaller grating periods together with thesame thickness of the grating region G result in higher aspect ratios ofthe first structure domains.

C. Applications

There are a high number of systems applying the components comprisingembedded microchannels. It is possible to distinguish between systemswhere the microchannels remain filled with air and such components wherethe component comprising the microchannels filled with air is anintermediate product and in the final system the microchannels arefilled with a material different from air.

a) Applications where Microchannels Remain Filled with Air.

In optical coating technology the range of useful optical coatingmaterials is limited. The lower limit for index of refraction for usefulhard coating materials is about 1.38 for MgF₂. There are materials withlower index, however those result in generally soft coatings and are notwidespread in use.

For dielectric submicron grating structures it is well known that if thegrating period is considerably smaller than the wavelength of the lightused, the grating layers act as an artificial material with anartificial index of refraction. This index of refraction is somethinglike an average of the materials indices in use in this grating layer.The known “effective medium theory” (in the context of zero ordergratings) allows to determine the artificial index of refraction. Bythis stable artificial coating layers with index of refractionconsiderably below the index of MgF₂ are possible.

Consider a zero order binary grating structure on a substrate withlamellar first domain structures and lamellar second domain structures.The first domain structures are filled with MgF₂ and the second domainstructures are empty or filled with air. The artificial index ofrefraction will be well below the index of pure MgF₂, depending on theduty cycle, which is the ratio of the first domain structure to thegrating period of the grating. These structures are well known, howeverup to now it was not practicable to fabricate multilayer structuresbased on such a very low index material, because of the difficulty toovercoat the surface structures without filling the second domainstructures. With the procedure according to the present invention it isnow possible to realize embedded microchannels. Most of the parts of thesecond domain structures remain empty or filled with air. Since thestructure can be completely closed it is possible to apply additionalcontinuous or structured layers.

1. Birefringent Layers

For one-dimensional zero order grating structures the previouslymentioned effective medium theory leads to an orientation dependenteffective index. The effective index parallel to the grating lines isdifferent from the effective index perpendicular to the grating lines.Based on the present invention it is now possible to realize multilayerstack birefringent layers. This allows to design and fabricate broadbandpolarizing beam splitters which are not angular dependent,non-polarizing color filter and dielectric mirror showing no angulardependency,

As a more specific example the possibility to create a polarizing beamsplitter which is not angular dependent is discussed. For non-conicalincidence the light can be orthogonally separated in TM-polarized lightand TE-polarized light. For TM-polarized light the electric field vectoroscillates in the plane of incidence, which is the non-conical plane asdefined before. For TE-polarized light the electric field vectoroscillates perpendicular to the plane of incidence. Basis of thepolarizing beam splitter is a quartz substrate with index of refractionof 1.48. On this quartz substrate a dielectric zero order grating basedon TiO₂ is realized, the duty cycle of which is chosen in such a waythat for TM polarization the artificial index corresponds to n(TM)=1.48.As this is a one-dimensional grating structure the artificial index ofTE-polarized light will be well above. According to the procedure of thepresent invention this grating structure is covered with an SiO₂ coatingwith index of refraction close to n=1.48. Another TiO₂ grating isapplied to the system with preferably the same duty-cycle as beforeleading to the same artificial indices. With such a method a multilayerstack can be built. The TM-polarized light will always face an index ofrefraction close to n=1.48, in case the cover material also is quartz.The TE-polarized light in contrast will propagate in a multilayer systemwith alternating high and low index layers. The thickness of theselayers can be adjusted so that the TE-polarized light is reflected veryefficiently, whereas the TM-polarized light will transmit veryefficiently. It is clear that the thicknesses of the layers can bedesigned in order to reflect only part of the incoming light, leading towavelength dependent polarizing beam splitters, useful for example foran image projection apparatus. Other transparent substrate materialssuch as glass, particularly BK7, SF1, SF2; or plastic can be used. Ifso, the layout of the structures and the layers needs to be adjusted.

2. Simple Overcoat.

It is a widespread problem that micron or submicron surface structureswhich are open to the environment are easily ruined due to dustscratches or other environmental influences. This is particularly truefor the so called wire grid polarizers based on one-dimensional zeroorder grating structures with thin metal wires filling the fiststructure domains and the second structure domains remaining filled withair. Coating the wire grids according to the prior art affects directlythe optical performance of the polarizer, since this fills the secondstructure domains with coating material. Coating these wire gridpolarizers with an overcoat according to the present invention protectsthese structures almost without filling the second structure domains.Taking the overcoat into account during the design of the layout withrespect to optical characteristics even has potential to improve theoptical performance, especially if the overcoat comprises a multilayerstack, typically a dielectric stack of alternating materials. Anotheraspect is that silver would be the material of choice for these metalgrids. However silver without protection exposed to the environmentdegrades in a very short time leading to minor optical performance. Thisis the reason why typically aluminum is used for the wire grids. Thepossibility of coating silver gratings without filling the secondstructure domains or without filling them completely in order toenvironmentally protect the silver enables the use of silver wire gridsin such applications. In this case it can be helpful to extend the(thin) side wall covers 11 down to the bottom of the microchannels15,15′ in order to additionally protect the silver containing firststructure domains.

b) Applications, where the Component According to the Present Inventionis an Intermediate Product.

The possibility of realizing microchannels within a grating structure,connected to the environment via thin connection channels opens thepossibility to fill the microchannels with fluids. The filling processcan be based on capillary forces.

i) Wire Grid Polarizers.

As shown in FIG. 2, there are different possible layouts for themicrochannels 15,15′. In some cases their shape is close to the optimumof the shape a metal wire should have in order to transmit onepolarization effectively while the other polarization is reflected. Sucha preferred shape is a structure where the wire at the top forms a longconnection channel 17 and the bottom has the shape of one or more sharpedges 19, as indicated in FIG. 4 a for the microchannels. Note that thematerial of the first structured domain 5, the coating material and thesubstrate material can be the same. A melt of metal or a solvent can nowbe applied on the top of the device sealing the connection channels 17,so capillary forces drag this fluid into the microchannels. Thereforethe microchannels are now filled with fluid 37 which form wire gridshaving the preferred geometry, as shown in FIG. 4 b. Once the fluid 37is in the microchannel it can be changed to its solid sate, for exampleby cooling a melt, if given.

ii) Applications with Fluids

The same capillary forces can be used to pull a liquid (or moregenerally chemical reagents or reaction products) from spot A to spot Bon a two dimensional component (see FIGS. 5 a and 5 b). Spot A can befunctional in one way, i.e. its function can be to confine a reagente.g. realized by a hydrophobic overcoat over the grating according tothe invention where a drop or liquid can be deposited onto. It canfurther act as a filter, e.g. to filter solid components of blood orprecipitated peptides from a liquid that is to be analyzed. The gratingstructure with microchannels thereby acts as a transport medium to spotB where a chemical reaction takes place. Here the surface can e.g. becovered by a chemical that can react with the liquid and be detected,e.g. in a fluorescence detection scheme. In a preferred embodiment theovercoat of the grating and the chemical sensibilization of the surfaceare distinct from each other in spot A, and spot B or additional spotson the device.

This is, of course, not limited to two spots A And B with transportregion in between but is extended to an array of spots.

The size of the spots can be chosen from 0.05 mm typical dimension to 5mm typical dimension. Of course this can be extended to other thanbiological chemical reactions.

To give a more specific example an analytical platform for filteringparticles in fluids is described (see FIGS. 5 a and 5 b). Thepossibility of choosing the width of the connection channels opens thepossibility of filtering particles 35 dispersed in a fluid 33. If forexample a droplet containing particles 35 with size larger than thewidth of the entrance channel is dispersed on the device, due tocapillary forces the fluid 33 will be attracted into the channels andspread out, along the channels in areas away from the originallyposition of the droplet. On the device the remaining larger particlescan be analyzed. The pure fluid in the channels can be analyzedseparately.

The width of the connecting channels can be chosen very accurately.Therefore it is possible to separate large particles which are blockedat the connection channels from smaller particles which can enter themicrochannels. With the production process according to the presentinvention it is possible to realize gradient characteristics along themicrochannels. There are different possibilities to realize this: Onepossibility is to realize domain structures 5 on the substrate which arelong elongated elements with empty second domain structures 7 inbetween, the width and/or depth of the second domain structures 7 beingin the range of several micrometers or below and the width of the seconddomain structures continuously varying along at least part of the lengthof the elongated elements. Coating the first domain structures 5according to the present invention results in microchannels withvariable width along at least part of the length of the microchannels.Another possibility is to realize the variation of the width of themicrochannels by introducing a gradient in the coating parameters as afunction of position on the substrate along the elongated elements andthereby introducing with respect to the position on the substrate alongthe elongated elements a dependence of the angular distribution of thecoating particles. This realization of gradient characteristics in themicrochannels allows for example to further separate particles ofdifferent size from each other.

In another application of the present invention the analytic componentis used as stabilization means for membranes, in particular biologicalmembranes, the stabilization providing free standing areas of themembrane in air or in fluids. In order to achieve this an analyticalplatform according to the present invention is used with connectionchannels 17 of well-defined width. The membrane is positioned directlyor indirectly on top of the cover layer C of the analytical platform.Parts of the membrane are connected to or at least indirectly in contactwith the surface of the cover 9. Free standing parts of the membranecover the connection channels 17. In some cases it is even possible tostabilize the membrane on the uncoated first structure domains, howevercoating the first structure domains according to the present inventionallows a direct and accurate control of the width of the free standingpart. If the free standing parts comprise proteins or receptors or otherfunctional means of membranes and in particular biological membranes itis possible to investigate the reactions and/or the dynamics of analmost unperturbed system. Fluids can be applied to the free standingpart membrane on both sides: on the side connected to the microchannelsand on the other side of the membrane opposite to the microchannels. Thefluid on the one side can differ from the fluid on the other side. Forexample different concentrations of ions can be realized and diffusionprocesses can be investigated.

In some biological processes the penetration of a specific substance onone side of the membrane leads to a specific reaction on the other sideof the membrane. Coupling for example a specific substance to themembrane from the environment can for example in a messenger substanceleaving the membrane diffusing into the microchannel which can beanalyzed. In some cases this leads to a change of the pH-value which canresult in a change of the color of the fluid which can be detected withdifferent optical methods.

Different optical schemes can be used for analyzing purposes. Forexample the first structure domains 5 could form waveguides. Thesewaveguides can be designed in such a way that light propagating in thiswaveguide establishes an evanescent field in the microchannels 15,15′.In FIG. 5 b shown in addition are coupling gratings 31 for couplinglight in or out of the waveguides. Gratings can be used as well tocouple light out of the hollow spaces. In general this allows forexample the detection of particles labeled with fluorescence markers.Even more general this device enables label detection as well as labelfree detection.

It has been shown, how components with embedded microchannels can berealized on the basis of submicron structures. Typically such structuresare periodic structures with typical feature sizes between 20 nm and 1μm. The depth ranges typically from 5 nm to 3 μm. However these numbersrepresent only typical values; other dimensions are possible as well.The basic idea to choose the layout of optical and/or analyticalcomponents adapted to practicably producible microchannel geometries hasbeen described in different examples throughout this disclosure. Inaddition it was explained how the geometry of the microchannels can beinfluenced by using special coating techniques. Examples have been givenfor applications of such components with the microchannels filled withair as well as filled with some other materials. This was mentioned tobe possible because of the capillary forces. However it is clear thatother forces could be applied as well, such as pressure, magnetic orelectrical forces. In addition to capillary forces it is possible to usecentrifugal forces by rotating the device with a rotation axis parallelto the surface normal in order to drag the fluids within themicrochannels away from the point where they entered the microchannels.

It is clear that the scope of the present invention goes beyond theexamples given for illustrative reasons. Clearly in the scope of thepresent invention is the possibility to have single or multilayer stackbetween the substrate 3 and the grating region G as well as on thebackside of the substrate 3 or on top of the cover region C. Thesestacks can be used to introduce stress compensating layers, to enhanceoptical performance, to introduce conducting layers or other electrical,optical, mechanical and/or chemical effect.

1. An optical component comprising: a substrate; a coating provided onthe substrate; an array of microstructures on the substrate; andmicrochannels formed by side walls of adjacent microstructures, a widthof the microchannels varying as a function of distance to the substrate,said width continuously decreasing with increasing distance from thesubstrate along a part of one of said microchannels, wherein saiddecrease of said width is realized by said coating.
 2. An opticalcomponent as claimed in claim 1 wherein at least some of themicrostructures of said array comprise a central body coated with acover on a top of said central body, said cover at least partiallycovering side walls of the central body thereby forming a microstructureside wall geometry extending over the top of the central body in such away that said width has a local a minimum above the top of the centralbody.
 3. An optical component as claimed in claim 2 wherein the localminimum of the width is a general minimum of the correspondingmicrochannel.
 4. An optical component comprising: a substrate; an arrayof microstructures on the substrate; and microchannels formed by sidewalls of adjacent microstructures, a width of the microchannels varyingas a function of distance to the substrate, said width continuouslydecreasing with increasing distance from the substrate along part of amicrochannel, wherein some of the microstructures of said array comprisea central body coated with a cover on a top of said central body, saidcover partially covering side walls of the central body thereby forminga microstructure side wall geometry extending over the top of thecentral body in such a way that said width has a local a minimum abovethe top of the central body. wherein said local minimum is equal to zeroand the microchannel is completely separated from the environment of thecomponent.
 5. An optical component comprising: a substrate; an array ofmicrostructures on the substrate; and microchannels formed by side wallsof adjacent microstructures, a width of the microchannels varying as afunction of distance to the substrate, said width continuouslydecreasing with increasing distance from the substrate along part of amicrochannel, wherein some of the microstructures of said array comprisea central body coated with a cover on a top of said central body, saidcover partially covering side walls of the central body thereby forminga microstructure side wall geometry extending over the top of thecentral body in such a way that said width has a local minimum above thetop of the central body. wherein said local minimum is at least close tozero and an at least almost closed microchannel is realized.
 6. Opticalcomponent as claimed in one of the claims 2 to 5 wherein the centralbody comprises a first layer system with at least one metallic layer andthe cover comprises a second layer system with at least one dielectriclayer.
 7. An analytical platform comprising: a substrate; a coatingprovided on the substrate; an array of microstructures on the substrate;microstructures, a width of the microchannels varying as a function ofdistance to the substrate, said width continuously decreasing withincreasing distance from the substrate along part of said microchannels,wherein said decrease of said width is realized by said coating.
 8. Ananalytical platform as claimed in claim 7, wherein the analyticalplatform is provided for filtering particles of given size out of afluid wherein a minimum dimension of said width within or above saidpart along said microchannel is equal to or slightly less than a minimumdimension of particles to be filtered out of a fluid.